[IEEE 2014 9th IEEE International Conference on Nano/Micro Engineered and Molecular Systems (NEMS) - Waikiki Beach, HI, USA (2014.4.13-2014.4.16)] The 9th IEEE International Conference on Nano/Micro Engineered and Molecular Systems (NEMS) - Development of a novel bidirectional electrothermal actuator and its application to RF MEMS switch
Zhu, Yan-qing, Han, Lei, Qin, Ming, Huang, Qing-an, Jiang, Ming-xiaYear:
2014
Language:
english
DOI:
10.1109/NEMS.2014.6908786
File:
PDF, 1.33 MB
english, 2014