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A novel vertical comb-drive electrostatic actuator using a one layer process
Hailu, Zewdu, He, Siyuan, Mrad, Ridha BenVolume:
24
Language:
english
Journal:
Journal of Micromechanics and Microengineering
DOI:
10.1088/0960-1317/24/11/115016
Date:
November, 2014
File:
PDF, 2.64 MB
english, 2014