[IEEE 2010 21st Annual IEEE/SEMI Advanced Semiconductor Manufacturing Conference (ASMC) - San Francisco, CA, USA (2010.07.11-2010.07.13)] 2010 IEEE/SEMI Advanced Semiconductor Manufacturing Conference (ASMC) - CMOS transistor scaling past 32nm and implications on variation
Kuhn, Kelin J.Year:
2010
Language:
english
DOI:
10.1109/asmc.2010.5551461
File:
PDF, 1.09 MB
english, 2010