[IEEE International Solid State Sensors and Actuators Conference (Transducers '97) - Chicago, IL, USA (16-19 June 1997)] Proceedings of International Solid State Sensors and Actuators Conference (Transducers '97) - New designs of micromachined vibrating rate gyroscopes with decoupled oscillation modes
Geiger, W., Folkmer, B., Sobe, U., Sandmaier, H., Lang, W.Volume:
2
Year:
1997
Language:
english
DOI:
10.1109/sensor.1997.635401
File:
PDF, 695 KB
english, 1997