[IEEE 2014 International Conference on Microelectronic Test Structures (ICMTS) - Udine, Italy (2014.3.24-2014.3.27)] 2014 International Conference on Microelectronic Test Structures (ICMTS) - Gated contact chains for process characterization in FinFET technologies
Brozek, Tomasz, Lam, Stephen, Yu, Shia, Pak, Mike, Liu, Tom, Valishayee, Rakesh, Yokoyama, NobuharuYear:
2014
Language:
english
DOI:
10.1109/icmts.2014.6841469
File:
PDF, 1.28 MB
english, 2014