[IEEE Microsystems (ASDAM) - Smolenice, Slovakia (2010.10.25-2010.10.27)] The Eighth International Conference on Advanced Semiconductor Devices and Microsystems - Effect of substrate temperature on oblique-angle sputtered ZnO:Ga thin films
Novotny, I., Kotorova, D., Flickyngerova, S., Tvarozek, V., Spiess, L., Schaaf, P., Netrvalova, M., Sutta, P.Year:
2010
Language:
english
DOI:
10.1109/asdam.2010.5666346
File:
PDF, 779 KB
english, 2010