Modeling Electrochemical Etching of Proton Irradiated...

Journal of Microelectromechanical Systems 2014 / 8 Vol. 23; Iss. 4

Modeling Electrochemical Etching of Proton Irradiated p-GaAs for the Design of MEMS Building Blocks

Koppe, Tristan, Rothfuchs, Charlotte, Schulte-Borchers, Martina, Hofsass, Hans, Boudinov, Henri, Vetter, Ulrich
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Volume:
23
Language:
english
Journal:
Journal of Microelectromechanical Systems
DOI:
10.1109/JMEMS.2014.2309178
Date:
August, 2014
File:
PDF, 3.41 MB
english, 2014
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