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[IEEE Workshop on Numerical Modeling of Processes and Devices for Integrated Circuits - Honolulu, HI (June 3-4, 1990)] Workshop on Numerical Modeling of Processes and Devices for Integrated Circuits - Adaptive Mesh Refinement For Multilayer Process Simulation
Baccus, B., Collard, D., Dubois, E.Year:
1990
Language:
english
DOI:
10.1109/nupad.1990.748290
File:
PDF, 189 KB
english, 1990