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Parameters Affecting the Electron Beam Sensitivity of Poly(methyl methacrylate)
Gipstein, E., Ouano, A. C., Johnson, D. E., Need, O. U.Volume:
21
Language:
english
Journal:
IBM Journal of Research and Development
DOI:
10.1147/rd.212.0143
Date:
March, 1977
File:
PDF, 852 KB
english, 1977