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[IEEE 2014 IEEE 11th International Conference on Semiconductor Electronics (ICSE) - Kuala Lumpur, Malaysia (2014.8.27-2014.8.29)] 2014 IEEE International Conference on Semiconductor Electronics (ICSE2014) - Design and fabrication of PCB based planar micro-coil for magnetic MEMS actuator
Pawinanto, Roer Eka, Yunas, Jumril, Said, Muzalifah Mohd., Noor, Mimiwaty Mohd., Majlis, Burhanuddin YeopYear:
2014
Language:
english
DOI:
10.1109/smelec.2014.6920904
File:
PDF, 1.80 MB
english, 2014