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[IEEE 2006 International Conference on Advanced Semiconductor Devices and Microsystems - Smolenice, Slovakia (2006.10.16-2006.10.18)] 2006 International Conference on Advanced Semiconductor Devices and Microsystems - Reduced-order modeling of capacitive MEMS microphones using mixed-level simulation
Niessner, M., Bedyk, W., Schrag, G., Wachutka, G., Margesin, B., Faes, A.Year:
2006
Language:
english
DOI:
10.1109/asdam.2006.331209
File:
PDF, 3.89 MB
english, 2006