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[IEEE 2001 Topical Meeting on Silicon Monolithic Integrated Circuits in RF Systems. Digest of Papers - Ann Arbor, MI, USA (12-14 Sept. 2001)] 2001 Topical Meeting on Silicon Monolithic Integrated Circuits in RF Systems. Digest of Papers (IEEE Cat. No.01EX496) - Tantalum nitride thin film resistors for integration into copper metallization based RF-CMOS and BiCMOS technology platforms
Henderson, R., Zurcher, P., Duvallet, A., Happ, C., Petras, M., Raymond, M., Remmel, T., Roberts, D., Steimle, B., Straub, S., Sparks, T., Tarabbia, M., Miller, M.Year:
2001
Language:
english
DOI:
10.1109/smic.2001.942343
File:
PDF, 88 KB
english, 2001