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[IEEE 2002 IEEE/LEOS International Conference on Optical MEMS - Lugano, Switzerland (20-23 Aug. 2002)] IEEE/LEOS International Conference on Optical MEMs - Microlens fabrication by the modified LIGA process and its modeling and analysis
Sung-Keun Lee,, Dong Sung Kim,, Sang Sik Yang,, Lee, S.S., Tai Hun Kwon,Year:
2002
Language:
english
DOI:
10.1109/omems.2002.1031451
File:
PDF, 168 KB
english, 2002