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[IEEE 2006 64th Device Research Conference - State College, PA, USA (2006.06.26-2006.06.28)] 2006 64th Device Research Conference - FinFET Performance Enhancement with Tensile Metal Gates and Strained Silicon on Insulator (sSOI) Substrate
Xiong, Weize, Shin, Kyoungsub, Cleavelin, C., Schulz, Thomas, Schruefer, Klaus, Cayrefourcq, I., Kennard, M., Mazure, C., Patruno, Paul, Liu, Tsu-jaeYear:
2006
Language:
english
DOI:
10.1109/DRC.2006.305109
File:
PDF, 2.38 MB
english, 2006