Fabrication of spin-valve sensors with quarter micron...

Fabrication of spin-valve sensors with quarter micron trackwidth using a double-layer resist system

Katakura, T., Miyauchi, T., Mizuguchi, T.
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Volume:
35
Language:
english
Journal:
IEEE Transactions on Magnetics
DOI:
10.1109/20.800907
Date:
January, 1999
File:
PDF, 436 KB
english, 1999
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