Fabrication of spin-valve sensors with quarter micron trackwidth using a double-layer resist system
Katakura, T., Miyauchi, T., Mizuguchi, T.Volume:
35
Language:
english
Journal:
IEEE Transactions on Magnetics
DOI:
10.1109/20.800907
Date:
January, 1999
File:
PDF, 436 KB
english, 1999