[IEEE 2009 International Conference on Simulation of Semiconductor Processes and Devices (SISPAD) - San Diego, CA, USA (2009.09.9-2009.09.11)] 2009 International Conference on Simulation of Semiconductor Processes and Devices - Using TCAD, Response Surface Model and Monte Carlo Methods to Model Processes and Reduce Device Variation
Basu, Dipanjan, Guha, J., Hatab, P., Vaidyanathan, P., Mouli, C., Groothuis, S. K.Year:
2009
Language:
english
DOI:
10.1109/SISPAD.2009.5290201
File:
PDF, 808 KB
english, 2009