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[IEEE 27th Annual Proceedings., International Reliability Physics Symposium - Phoenix, AZ, USA (11-13 April 1989)] 27th Annual Proceedings., International Reliability Physics Symposium - Effect of mechanical stress for thin SiO/sub 2/ films in TDDB and CCST characteristics
Ohno, Y., Ohsaki, A., Kaneoka, T., Mitsuhashi, J., Hirayama, M., Kato, T.Year:
1989
Language:
english
DOI:
10.1109/RELPHY.1989.36314
File:
PDF, 356 KB
english, 1989