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[IEEE 5th IEEE Conference on Nanotechnology, 2005. - Nagoya, Japan (July 11-15, 2005)] 5th IEEE Conference on Nanotechnology, 2005. - Ultrasonics for nanoimprint lithography
Chien-Hung Lin,, Rongshun Chen,, Chien-Chang Su,, Fuh-Yu Chang,Year:
2005
Language:
english
DOI:
10.1109/NANO.2005.1500799
File:
PDF, 529 KB
english, 2005