InP-based optical waveguide MEMS switches with evanescent...

Journal of Microelectromechanical Systems 2005 / 10 Vol. 14; Iss. 5

InP-based optical waveguide MEMS switches with evanescent coupling mechanism

Pruessner, M.W., Amarnath, K., Datta, M., Kelly, D.P., Kanakaraju, S., Ping-Tong Ho,, Ghodssi, R.
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Volume:
14
Language:
english
Journal:
Journal of Microelectromechanical Systems
DOI:
10.1109/JMEMS.2005.851848
Date:
October, 2005
File:
PDF, 1.59 MB
english, 2005
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