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[Japan Soc. Appl. Phys Extended Abstracts of the Second International Workshop on Junction Technology - Tokyo, Japan (29-30 Nov. 2001)] Extended Abstracts of the Second International Workshop on Junction Technology. IWJT. (IEEE Cat.No.01EX541C) - Impact of STI stress on the junction characteristics
Shiozawa, K., Horita, K., Kuroi, T., Abe, Y., Eimori, T.Year:
2001
Language:
english
DOI:
10.1109/iwjt.2001.993818
File:
PDF, 237 KB
english, 2001