A pneumatic air table realized by micro-EDM

Journal of Microelectromechanical Systems 1998 / Dec. Vol. 7; Iss. 4

A pneumatic air table realized by micro-EDM

Guenat, O.T., Hirata, T., Akashi, T., Gretillat, M.-A., de Rooij, N.F.
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Volume:
7
Language:
english
Journal:
Journal of Microelectromechanical Systems
DOI:
10.1109/84.735345
Date:
January, 1998
File:
PDF, 397 KB
english, 1998
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