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Tungsten-Microhotplate-Array-Based Pirani Vacuum Sensor System With On-Chip Digital Front-End Processor
Wang, Jiaqi, Tang, Zhenan, Li, JinfengVolume:
20
Language:
english
Journal:
Journal of Microelectromechanical Systems
DOI:
10.1109/jmems.2011.2148157
Date:
August, 2011
File:
PDF, 971 KB
english, 2011