[IEEE 1996 Conference on Optoelectronic and Microelectronic...

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[IEEE 1996 Conference on Optoelectronic and Microelectronic Materials and Devices. Proceedings - Canberra, ACT, Australia (8-11 Dec. 1996)] 1996 Conference on Optoelectronic and Microelectronic Materials and Devices. Proceedings - Low temperature preparation of the SiO/sub 2/ films with low interface trap density using ECR diffusion and ECR CVD method

Bup-Ju Jeon,, Il-Hyun Jung,, In-Hwan Oh,, Tae-Hoon Lim,
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Year:
1996
Language:
english
DOI:
10.1109/COMMAD.1996.610122
File:
PDF, 275 KB
english, 1996
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