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[IEEE 2014 15th International Conference on Thermal, Mechanical and Multi-Physics Simulation and Experiments in Microelectronics and Microsystems (EuroSimE) - Belgium (2014.04.7-2014.04.9)] 2014 15th International Conference on Thermal, Mechanical and Mulit-Physics Simulation and Experiments in Microelectronics and Microsystems (EuroSimE) - Characterization and post simulation of thin-film PZT actuated plates for haptic applications
Casset, F., Danel, JS., Renaux, P., Chappaz, C., Le Rhun, G., Dieppedale, C., Gorisse, M., Basrour, S., Fanget, S., Ancey, P., Devos, A., Defay, E.Year:
2014
Language:
english
DOI:
10.1109/eurosime.2014.6813769
File:
PDF, 985 KB
english, 2014