[IEEE 2013 IEEE International Nanoelectronics Conference (INEC) - Singapore, Singapore (2013.01.2-2013.01.4)] 2013 IEEE 5th International Nanoelectronics Conference (INEC) - Stoichiometric amorphous hydrogenated silicon carbide thin film synthesis using DC-saddle plasma enhanced chemical vapour deposition
Karimi, Behzad Jazizadeh, Dow, Ali B. Alamin, Kherani, Nazir P.Year:
2013
DOI:
10.1109/inec.2013.6465984
File:
PDF, 430 KB
2013