[IEEE International Solid-State Sensors and Actuators...

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[IEEE International Solid-State Sensors and Actuators Conference - TRANSDUCERS '95 - Stockholm, Sweden (June 25-29, 1995)] Proceedings of the International Solid-State Sensors and Actuators Conference - TRANSDUCERS '95 - A New Approch To Low Drift Ta/sub2/O/sub5/ By pH Reactive Sputtering And Sol-gel Method

Dae-Hyuk Kwon,, Byung-Woog Cho,, Chang-Soo Kim,, Byung-Ki Sohn,
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Volume:
2
Year:
1995
Language:
english
DOI:
10.1109/sensor.1995.721989
File:
PDF, 242 KB
english, 1995
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