Atomic Layer Deposition of Iridium Thin Films
Aaltonen, Titta, Ritala, Mikko, Sammelselg, Väino, Leskelä, MarkkuVolume:
151
Year:
2004
Language:
english
Journal:
Journal of The Electrochemical Society
DOI:
10.1149/1.1761011
File:
PDF, 340 KB
english, 2004