[IEEE 1990 IEEE SOS/SOI Technology Conference. - Key West,...

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[IEEE 1990 IEEE SOS/SOI Technology Conference. - Key West, FL, USA (2-4 Oct. 1990)] 1990 IEEE SOS/SOI Technology Conference. Proceedings - Highly selective etch stop by stress compensation for thin-film BESOI

Hunt, C.E., Rouse, G.V., Harendt, C., Green, M.L.
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Year:
1990
Language:
english
DOI:
10.1109/sossoi.1990.145753
File:
PDF, 159 KB
english, 1990
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