Nonlinear Dynamic Study of a Bistable MEMS: Model and...

Journal of Microelectromechanical Systems 2004 / 10 Vol. 13; Iss. 5

Nonlinear Dynamic Study of a Bistable MEMS: Model and Experiment

Sulfridge, M., Saif, T., Miller, N., Meinhart, M.
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Volume:
13
Language:
english
Journal:
Journal of Microelectromechanical Systems
DOI:
10.1109/jmems.2004.835766
Date:
October, 2004
File:
PDF, 559 KB
english, 2004
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