Cavity Ring-Down Spectroscopy Measurement of H( n =2) Density in Mesoplasma for Fast-Rate Silicon Epitaxy
Wu, Sudong, Inoue, Hisato, Kambara, Makoto, Yoshida, ToyonobuVolume:
52
Language:
english
Journal:
Japanese Journal of Applied Physics
DOI:
10.7567/JJAP.52.071301
Date:
July, 2013
File:
PDF, 644 KB
english, 2013