Cavity Ring-Down Spectroscopy Measurement of H(...

Cavity Ring-Down Spectroscopy Measurement of H( n =2) Density in Mesoplasma for Fast-Rate Silicon Epitaxy

Wu, Sudong, Inoue, Hisato, Kambara, Makoto, Yoshida, Toyonobu
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Volume:
52
Language:
english
Journal:
Japanese Journal of Applied Physics
DOI:
10.7567/JJAP.52.071301
Date:
July, 2013
File:
PDF, 644 KB
english, 2013
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