![](/img/cover-not-exists.png)
[IEEE 2009 International Symposium on Optomechatronic Technologies (ISOT 2009) - Istanbul, Turkey (2009.09.21-2009.09.23)] 2009 International Symposium on Optomechatronic Technologies - A high-precision dilatometer based on sub-nm heterodyne interferometry
Schuldt, Thilo, Gohlke, Martin, Weise, Dennis, Johann, Ulrich, Braxmaier, ClausYear:
2009
Language:
english
DOI:
10.1109/isot.2009.5326114
File:
PDF, 2.22 MB
english, 2009