Design of Out-of-Plane MOEMS Accelerometer With...

IEEE Photonics Technology Letters 2014 / 5 Vol. 26; Iss. 10

Design of Out-of-Plane MOEMS Accelerometer With Subwavelength Gratings

Baoyin Yao,, Lishuang Feng,, Xiao Wang,, Meihua Liu,, Zhen Zhou,, Weifang Liu,
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Volume:
26
Language:
english
Journal:
IEEE Photonics Technology Letters
DOI:
10.1109/lpt.2014.2312796
Date:
May, 2014
File:
PDF, 1.03 MB
english, 2014
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