Microelectromechanical Resonator Characterization Using...

Journal of Microelectromechanical Systems 2007 / 10 Vol. 16; Iss. 5

Microelectromechanical Resonator Characterization Using Noncontact Parametric Electrostatic Excitation and Probing

Cheng, K.M., Weng, Z., Oliver, D.R., Thomson, D.J., Bridges, G.E.
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Volume:
16
Language:
english
Journal:
Journal of Microelectromechanical Systems
DOI:
10.1109/jmems.2007.901116
Date:
October, 2007
File:
PDF, 592 KB
english, 2007
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