Electrical Properties of Cr–N Films Deposited by...

Japanese Journal of Applied Physics 2012 / 1 Vol. 51; Iss. 1

Electrical Properties of Cr–N Films Deposited by Sputtering: Application to Cryogenic Temperature Sensors

Satoh, Kazuo, Kakehi, Yoshiharu, Uno, Mayumi, Sakurai, Yoshiaki, Yotsuya, Tsutom, Ishida, Takekazu
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Volume:
51
Language:
english
Journal:
Japanese Journal of Applied Physics
DOI:
10.1143/JJAP.51.01AC07
Date:
January, 2012
File:
PDF, 665 KB
english, 2012
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