Growth mechanism of microcrystalline and polymorphous silicon film with pure silane source gas
Li, Shi-Bin, Wu, Zhi-Ming, Jiang, Ya-Dong, Yu, Jun-Sheng, Li, Wei, Liao, Nai-ManVolume:
41
Language:
english
Journal:
Journal of Physics D: Applied Physics
DOI:
10.1088/0022-3727/41/10/105207
Date:
May, 2008
File:
PDF, 253 KB
english, 2008