Advanced process technologies: Plasma, direct-write,...

MRS Bulletin 2011 / 11 Vol. 36; Iss. 11

Advanced process technologies: Plasma, direct-write, atmospheric pressure, and roll-to-roll ALD

(Erwin) Kessels, W.M.M., Putkonen, Matti
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Volume:
36
Language:
english
Journal:
MRS Bulletin
DOI:
10.1557/mrs.2011.239
Date:
November, 2011
File:
PDF, 810 KB
english, 2011
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