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Angular Dependence of the Ion-Induced Secondary Electron Emission for He+ and Ga+ Beams
Castaldo, Vincenzo, Withagen, Josephus, Hagen, Cornelius, Kruit, Pieter, van Veldhoven, EmileVolume:
17
Language:
english
Journal:
Microscopy and Microanalysis
DOI:
10.1017/S1431927611000225
Date:
July, 2011
File:
PDF, 1.07 MB
english, 2011