Fracture of organosilicate glass thin films: environmental...

Fracture of organosilicate glass thin films: environmental effects

J.J. Vlassak, Y. Lin, T.Y. Tsui
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Volume:
391
Year:
2005
Language:
english
Pages:
16
DOI:
10.1016/j.msea.2004.08.070
File:
PDF, 859 KB
english, 2005
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