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Plasma-polymerized hexamethyldisilazane treated by nitrogen plasma immersion ion implantation technique
Honda, R Y, Mota, R P, Batocki, R G S, Santos, D C R, Nicoleti, T, Kostov, K G, Kayama, M E, Algatti, M A, Cruz, N C, Ruggiero, LVolume:
167
Language:
english
Journal:
Journal of Physics: Conference Series
DOI:
10.1088/1742-6596/167/1/012055
Date:
May, 2009
File:
PDF, 408 KB
english, 2009