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[IEEE 2012 IEEE 55th International Midwest Symposium on Circuits and Systems (MWSCAS) - Boise, ID, USA (2012.08.5-2012.08.8)] 2012 IEEE 55th International Midwest Symposium on Circuits and Systems (MWSCAS) - 3D profiling of thin film using contour analysis of interference fringe image and interpolation method
Kang, Hyun-Soo, Suh, Jae-Won, Ko, Yun-HoYear:
2012
Language:
english
DOI:
10.1109/MWSCAS.2012.6292183
File:
PDF, 747 KB
english, 2012