The Effect of Adhesion on the Static Friction Properties of...

Journal of Microelectromechanical Systems 2006 / 12 Vol. 15; Iss. 6

The Effect of Adhesion on the Static Friction Properties of Sidewall Contact Interfaces of Microelectromechanical Devices

Timpe, Shannon J., Komvopoulos, Kyriakos
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Volume:
15
Language:
english
Journal:
Journal of Microelectromechanical Systems
DOI:
10.1109/jmems.2006.885855
Date:
December, 2006
File:
PDF, 2.45 MB
english, 2006
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