[IEEE International Conference on Advanced Thermal Processing of Semiconductors - Charleston, NC, USA (23-26 Sept. 2003)] 11th IEEE International Conference on Advanced Thermal Processing of Semiconductors. RTP 2003 - Temperature dependent emissivity metrology development at NIST in support of RTP needs
Hanssen, L.M., Khromchenko, V., Mekhontsev, S.N.Year:
2003
Language:
english
DOI:
10.1109/RTP.2003.1249135
File:
PDF, 309 KB
english, 2003