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[IEEE IEEE Technical Digest on Solid-State Sensor and Actuator Workshop - Hilton Head Island, SC, USA (6-9 June 1988)] IEEE Technical Digest on Solid-State Sensor and Actuator Workshop - Calibrated measurements of elastic limit, modulus, and the residual stress of thin films using micromachined suspended structures
Maseeh, F., Schmidt, M.A., Allen, M.G., Senturia, S.D.Year:
1988
DOI:
10.1109/solsen.1988.26439
File:
PDF, 299 KB
1988