Inclination of a threading dislocation in an epilayer of...

Japanese Journal of Applied Physics 2014 / 11 Vol. 53; Iss. 11

Inclination of a threading dislocation in an epilayer of 4H-SiC

Saka, Hiroyasu, Watanabe, Hiroki, Kitou, Yasuo, Kondo, Hiroyuki, Hirose, Fusao, Onda, Shoichi
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Volume:
53
Language:
english
Journal:
Japanese Journal of Applied Physics
DOI:
10.7567/JJAP.53.111302
Date:
November, 2014
File:
PDF, 891 KB
english, 2014
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