[IEEE IEEE Conference on Decision and Control - Las Vegas,...

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[IEEE IEEE Conference on Decision and Control - Las Vegas, NV, USA (10-13 Dec. 2002)] Proceedings of the 41st IEEE Conference on Decision and Control, 2002. - Model development and inverse compensator design for high speed nanopositioning

Smith, R.C., Salapaka, M.V., Hatch, A., Smith, J., De, T.
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Volume:
4
Year:
2002
Language:
english
DOI:
10.1109/CDC.2002.1184930
File:
PDF, 371 KB
english, 2002
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