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[IEEE 2013 IEEE/ACM International Conference on Computer-Aided Design (ICCAD) - San Jose, CA, USA (2013.11.18-2013.11.21)] 2013 IEEE/ACM International Conference on Computer-Aided Design (ICCAD) - Constrained pattern assignment for standard cell based triple patterning lithography
Tian, Haitong, Du, Yuelin, Zhang, Hongbo, Xiao, Zigang, Wong, Martin D.F.Year:
2013
Language:
english
DOI:
10.1109/iccad.2013.6691116
File:
PDF, 734 KB
english, 2013