Electrochemically Assisted Maskless Selective Removal of...

Journal of Microelectromechanical Systems 2011 / 08 Vol. 20; Iss. 4

Electrochemically Assisted Maskless Selective Removal of Metal Layers for Three-Dimensional Micromachined SOI RF MEMS Transmission Lines and Devices

Sterner, Mikael, Roxhed, Niclas, Stemme, Göran, Oberhammer, Joachim
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Volume:
20
Language:
english
Journal:
Journal of Microelectromechanical Systems
DOI:
10.1109/jmems.2011.2159100
Date:
August, 2011
File:
PDF, 1.95 MB
english, 2011
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