Structural and Electrical Characterization of Oxidated,...

Structural and Electrical Characterization of Oxidated, Nitridated and Oxi-nitridated (100) GaAs Surfaces

Paul, Narayan Chandra, Nakamura, Kazuki, Takebe, Masahide, Takemoto, Akira, Inokuma, Takao, Iiyama, Koichi, Takamiya, Saburo, Higashimine, Koichi, Ohtsuka, Nobuo, Yonezawa, Yasuto
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Volume:
42
Language:
english
Journal:
Japanese Journal of Applied Physics
DOI:
10.1143/JJAP.42.4264
Date:
July, 2003
File:
PDF, 808 KB
english, 2003
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