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[IEEE Engineering Solutions for the Next Millennium. 1999 IEEE Canadian Conference on Electrical and Computer Engineering - Edmonton, Alta., Canada (9-12 May 1999)] Engineering Solutions for the Next Millennium. 1999 IEEE Canadian Conference on Electrical and Computer Engineering (Cat. No.99TH8411) - Measuring the deflection of a micromachined cantilever-in-cantilever device using a piezoresistive sensor
Yuan Ma,, Robinson, A.M., Lawson, R.P.W., Bing Shen,, Strembicke, D., Allegretto, W.Volume:
3
Year:
1999
Language:
english
DOI:
10.1109/ccece.1999.804961
File:
PDF, 427 KB
english, 1999