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[IEEE 2010 23rd International Vacuum Nanoelectronics Conference (IVNC) - Palo Alto, CA, USA (2010.07.26-2010.07.30)] International Vacuum Nanoelectronics Conference - 7.4: Dose control circuits for digitally addressable VACNF based maskless lithography
Eliza, Sazia A., Islam, Syed K., Rahman, Touhidur, Bull, Nora D., Blalock, Benjamin J., Baylor, Larry R., Ericson, Milton N., Gardner, Walter L.Year:
2010
Language:
english
DOI:
10.1109/IVNC.2010.5563200
File:
PDF, 314 KB
english, 2010